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PEAKFORCE-HIRS-F-A

Frequency

Nom: 165 KHz

Spring Const.

Nom: 0.35N/m

Geometry

Special

Tip Radius

1(nm)

Material

Silicon Nitride

Coating

B: Reflective Au

Frequency

Nom: 130 KHz

Spring Const.

Nom: 0.4N/m

Geometry

Rectangular

Tip Radius

30(nm)

Frequency

Nom: 55 KHz

Spring Const.

Nom: 0.25N/m

Geometry

Rectangular

Tip Radius

10(nm)

Frequency

Nom: 85 KHz

Spring Const.

Nom: 0.100N/m

Geometry

Paddle

Tip Radius

70(nm)

Frequency

Nom: 9 KHz

Spring Const.

Nom: 0.8N/m

Geometry

Rectangular

Tip Radius

<20(nm)

Material

Solid Platinum

Frequency

Nom: 150 KHz

Spring Const.

Nom: 5N/m

Geometry

Rectangular

Tip Radius

30(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

B: Reflective Aluminum

Frequency

Nom: 40 KHz

Spring Const.

Nom: 0.25N/m

Geometry

Rectangular

Tip Radius

1000(nm)

Material

Nitride

Coating

B: Au

Frequency

Nom: 75 KHz

Spring Const.

Nom: 2.8N/m

Geometry

Rectangular

Tip Radius

15(nm)

Material

0.01 - 0.025 Ocm Antimony (n) doped Si

Coating

F: Conductive PtSi

B: Reflective Al

Frequency

Nom: 75 KHz

Spring Const.

Nom: 8N/m

Geometry

Rectangular

Tip Radius

50 ± 10(nm)

Material

Silicon Nitride

Coating

B: TiW/Au (500)

Frequency

Nom: 320 KHz

Spring Const.

Nom: 37N/m

Geometry

Rectangular

Tip Radius

2(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

B: Reflective Aluminum

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