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Scanning Spreading Resistance Mode (SSRM)
Scanning Spreading Resistance Mode (SSRM) is a technique based on contact mode that is is frequently used to map the variation in majority carrier concentration in doped semiconductors. Sensor Signal is the electric current between the conductive tip and sample for an applied DC bias, VDC. Using a logarithmic amplifier, SSRM measures the current by referencing it to an internal resistor, thereby yielding a local resistance value.
Frequency
Nom: 105KHz
Spring Const.
Nom: 6N/m
Geometry
Rectangular
Tip Radius
100nmMaterial
0.010-0.025 Ωcm Antimony (n) doped SiCoating
Conductive DiamondF: Conductive Diamond
B: Reflective Aluminum