Calibration References (By Accessory Type) | Bruker

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AFM scanners should be calibrated periodically to ensure the precision and accuracy of their measurements. References can be used as a general purpose sample of known feature sizes to calibrate a scanner within a certain tolerance. Calibration references are different from calibration standards, as standards are typically certified against a NIST or PTB traceable sample. Calibration references are not traceable to these types of samples.

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Calibration artifact: 180nm step height, 10µm pitch

Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on 15mm Puck

Unmounted p-type staircase SSRM sample

Unmounted Oxide sample

Calibration artifact: 100nm step height, 3µm pitch

Calibration artifact: 44nm step height, 10µm pitch

Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on a glass slide

Calibration artifact: 18nm step height, 3µm pitch

Calibration artifact: 100nm step height, 10µm pitch

Calibration artifact: 44nm step height, 3µm pitch

Calibration artifact: 180nm step height, 3µm pitch

Calibration artifact: 18nm step height, 10µm pitch

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