Calibration References
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated, on 15mm Puck
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated, on 18mm Puck
Calibration artifact: grating for CP & CP-II
Calibration artifact: 180nm step height, 10µm pitch
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on 15mm Puck
Unmounted n-type staircase SSRM sample.
Unmounted p-type staircase SSRM sample
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated
Unmounted Oxide sample
Calibration artifact: 100nm step height, 3µm pitch
Calibration artifact: 44nm step height, 10µm pitch
Calibration artifact: 18nm step height, 3µm pitch
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on a glass slide
Calibration artifact: 44nm step height, 3µm pitch
Calibration artifact: 180nm step height, 3µm pitch