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Calibration References
AFM scanners should be calibrated periodically to ensure the precision and accuracy of their measurements. References can be used as a general purpose sample of known feature sizes to calibrate a scanner within a certain tolerance. Calibration references are different from calibration standards, as standards are typically certified against a NIST or PTB traceable sample. Calibration references are not traceable to these types of samples.
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated, on 15mm Puck
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated, on 18mm Puck
Calibration artifact: grating for CP & CP-II
Calibration artifact: 180nm step height, 10µm pitch
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on 15mm Puck
Unmounted n-type staircase SSRM sample.
Unmounted p-type staircase SSRM sample
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated
Unmounted Oxide sample
Calibration artifact: 100nm step height, 3µm pitch
Calibration artifact: 44nm step height, 10µm pitch
Calibration artifact: 18nm step height, 3µm pitch
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, on a glass slide
Calibration artifact: 44nm step height, 3µm pitch
Calibration artifact: 180nm step height, 3µm pitch