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PeakForce Deep Trench

Bruker’s PeakForce Deep Trench (PFDT) series of probes are engineered to provide accurate depth metrology and imaging on the most challenging structures encountered on semiconductor samples and optics, including trenches and pits with aggressive aspect ratios and depth of more than 100nm.  The PFDT series complements Bruker’s wide range of HAR and FIB probes such as HAR-1-200A-10, TESP-HAR, FIB2-100s, and others. While the HAR and FIB families of probes are traditionally used in Tapping mode, the PFDT series is specifically design for use on Dimension Icon with PeakForce Tapping technology.