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SMIM-150
Geometry
RectangularFrequency (KHz)
Nom: 75
Min: 70
Max: 80
Length (µm)
Nom: 150
Min: 145
Max: 155
Spring Const (N/m)
Nom: 8
Min: 7
Max: 9
Width (µm)
Nom: 50
Min: 47
Max: 53
Price: $865.00 (USD)
Sold in packs of 5
Questions? Free, Online Consulting
Overview
Nitride probe with shielded co-axial sensor for sMIM.
- Nominal 75 kHz, 8 N/m
- 5 Probes
- Nominal 75 kHz, 8 N/m
- 5 Probes
Tip Specification
Tip Height (h): 4.5 - 5.5 µm
Front Angle (FA): 35 ± 1º
Back Angle (BA): 35 ± 1º
Side Angle (SA): 35 ± 1º
Cantilever Specification
Material: Silicon Nitride
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 3.6µm
Cantilever Thickness (RNG): 3.3 - 3.9µm
Back Side Coating: TiW/Au (500)