Tunneling AFM (TUNA)

TUNA and Conductive AFM use a conductive afm probe in contact mode. The sensor signal is the electric current between the afm tip and the conductive sample for an applied DC bias. In feedback mode, the output signal is the DC bias, adjusted to maintain the electric current setpoint. Currents range from µA for CAFM to fA for TUNA. Applications include experimentation in thin film dielectrics for both strength and thickness uniformity in thin films of semiconductor and data storage devices as well as conductive polymers.