DDESP-FM-V2

Pyramidal Solid Diamond Probes

The IMEC diamond AFM tips are made from solid boron-doped polycrystalline diamond.  These extremely hard tips enable high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM) and other electrical and mechanical characterization methods.  Each probe has three different cantilevers with distinct spring constants for ultimate versatility.

The tips are made of B-doped polycrystalline diamond in a pyramidal shape.  The measured resistance of the diamond tips on a Platinum surface is between 10 and 1000 kOhm, depending on the tip radius.  The electrical resolution can be below 1nm, as measured on a dedicated buried oxide sample in an optimized environment.

Each probe has three cantilevers with different spring constants covering a wide range of force constants, from 3 to 27 N/m.  The Ni cantilevers are mounted on a metallized Si chip (3.4 x 1.6 x 0.4 mm).

Bruker AFM Probes has introduced an improved version of its popular,TESP/TESPA AFM probes. Bruker’s new line of TESP high quality premium etched silicon probes set the industry standard for TappingMode™ and non-contact mode in air.  

The new design provides:
•         Tighter dimensional specifications for improved probe to probe consistency
•         Tighter alignment of the tip apex to the cantilever resulting in easier laser positioning over the tip
•         Improved probe quality & aesthetics  

This AFM probe is unmounted for use on any AFM and is also available without Aluminum reflex coating as model TESP-V2.  

Bruker SCM-PtSi Probes

For the highest resolution nanoelectrical measurements with outstanding wear resistance.

Bruker's new platinum silicide AFM probe is the ideal choice for Scanning Capacitance Microscopy measurements on the most advanced semiconductor features, providing the highest resolution imaging and long tip lifetime due to its outstanding wear resistant properties. 

• The Bruker SCM-PtSi probe provides:
• • High resolution electrical imaging with an ultra-sharp conductive tip
  • Consistent performance with high measurement lifetime
  • Highly sensitive nanoelectrical measurements
• • High quality probe manufactured at Bruker AFM Probes

Other applications of the SCM-PtSi probe include: conductivity measurements (Conductive AFM (C-AFM) and PeakForce TUNA), Electrical Force Microscopy (EFM), and other characterization applications.

Bruker Atomic Force Microscopy group also provides many other nano-electrical probes and modes for AFM based electrical measurements including our unique PeakForce KPFM & PeakForce TUNA modes.

Bruker DDESP-V2 Electrical Probes

Providing consistent performance and high sensitivity.

Bruker's new conductive diamond coated probe provides high performance Scanning Spreading Resistance Microscopy (SSRM) and Piezoresponse Force Microscopy (PFM) to characterize advanced semiconductor devices,  Microelectromechanical Systems (MEMS), and biosensors providing the prolonged tip lifetime in combination with boosted conductivity.

The DDESP-V2 probe provides:

• • High electrical performance due to its consistent tip shape
  • Sensitive nanoelectrical measurements with highly conductive coating
  • High resolution electrical imaging with a sharp conductive tip
• • High quality probe manufactured by Bruker AFM Probes

Other applications of the DDESP-V2 probe include: Scanning Capacitance Microscopy (SCM), conductivity measurements (C-AFM and PeakForce TUNA), and other electrical characterization applications.

For the highest resolution SSRM measurements, Bruker also offers solid diamond probes with pyramidal tips; please see model SSRM-DIA.

For non-electrical applications where wear resistance is required, the diamond-like carbon (DLC) coated probes, Model TESPD provide a cost effective alternative.

Bruker Atomic Force Microscopy group also provides many other nano-electrical probes and modes for AFM based electrical measurements including our unique PeakForce KPFM & PeakForce TUNA modes.