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Critical Dimension (CD) AFM

Critical Dimension Atomic Force Microscopy (CDAFM) is a proprietary AFM mode from Bruker. This nondestructive, high-resolution technique enables accurate measurement of three-dimensional (3D) features by using boot-shaped CD AFM probes. CD-AFM accurately provides highly linear measurements over a range of line-widths and is unaffected by feature type, density or material type. The technique is able to measure undercut features and can be calibrated using NIST traceable standards to ensure measurement accuracy.