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CDR850C
Geometry
RectangularFrequency (KHz)
Nom: 300
Min: 200
Max: 400
Length (µm)
Nom: 125
Min: 115
Max: 135
Spring Const (N/m)
Nom: 40
Min: 20
Max: 80
Width (µm)
Nom: 40
Min: 38
Max: 42
Questions? Free, Online Consulting
Overview
CDR-850C probes, 5-pack, for advanced depth and sidewall characterization
- Target effective length 5-7.5μm and target width 650-850nm.
- Overhang 100-150nm
- Carbon coating for improved wear characteristics
Tip Specification
Single Crystal Si coated with Carbon
Overhang: 125 ± 25
Effective Length: 6250 ± 1250
Tip Width: 750 ± 100
Cantilever Specification
Material: Single Crystal Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 3.40µm
Cantilever Thickness (RNG): 2.65 - 4.15µm
Back Side Coating: Reflective Al