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EBD-CDR50

Geometry
Rectangular
Frequency (KHz)
Nom: 300
Min: 200
Max: 400
Length (µm)
Nom: 125
Min: 115
Max: 135
Spring Const (N/m)
Nom: 40
Min: 20
Max: 80
Width (µm)
Nom: 35
Min: 30
Max: 40
Price: $3,000.00 (USD)
Price: $3,000.00 (USD)
Sold in packs of 5
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Questions? Free, Online Consulting
Overview
The EBD-CDR probes for 3D reference and hybrid metrology: witha full range of EBD-CDR probes from 130 nm down to 15 nm, this ispushing the limits of 3D-AFM technology for measuring tight dimensionsand extending its capability for future nodes. It brings EBD´skey strength: precise tip orientation, precise control in tip dimensions(length, total diameter, vertical edge height, overhang) and largevolumeproduction to undercut applications. These tips do not have a wearresistance coating - butmade from bulk wear resistance diamond like carbon.
Tip Specification
EBD-CDR50 Tip Image
50 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life.
Tip Height (h): 10 - 15 µm
Overhang: 5 - 10
Effective Length: 200 - 250
Vertical Edge Height: <15
Cantilever Specification
EBD-CDR50 Cantilever Image
Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.
Material: 0.01 - 0.025Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilever Thickness (Nom): 3.75µm
Cantilever Thickness (RNG): 3.0-4.5µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 40 ± 10 nm of Al
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