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CDR1000-10UM
Geometry
RectangularFrequency (KHz)
Nom: 300
Min: 200
Max: 400
Length (µm)
Nom: 125
Min: 115
Max: 135
Spring Const (N/m)
Nom: 40
Min: 20
Max: 80
Width (µm)
Nom: 40
Min: 38
Max: 42
Questions? Free, Online Consulting
Overview
CDR1000-10um probes, 5-pack, for advanced depth and sidewall characterization
- Target effective length 10μm and target width 1000nm.
- Al Reflective backside coating
- Optimized for Bruker's patented CD mode
Tip Specification
Overhang: 200 ± 100
Effective Length: 10.0 ± 1.0
Tip Width: 1150 ± 50
Cantilever Specification
Material: Single Crystal Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 3.40µm
Cantilever Thickness (RNG): 2.65-4.15µm
Back Side Coating: Aluminum