DRPFC25-250

3N/m,150kHz,350 nm spike length, 30nm wide spike @ 250 nm, Al reflective coating, 12-degree tilt

The Bruker Nano-Tube (BNT) probe is a robust, high aspect ratio probe designed for the challenging applications in semiconductor process control.

The high aspect and hard wearing, diamond-like carbon tip is optimized for depth metrology applications.
With its ~8 nm tip radius this probe also guarantees accurate roughness measure with long term repeatability.

Highlights:
1.  High Aspect Ratio: “spike” length of 500 nm and width of just 30 nm enabling various critical dimension measurements of deep trenches.
2.  Tilt Compensation: 12 degree compensated ensuring the “spike” is normal to the sample plane while in use, enhancing access to deep trench features.
3.  Consistent Tip: Uniform width for enduring high resolution roughness measurements.
4.  Longevity: Durable material properties ensure high throughput measure and overall consumable cost efficiency.