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FIB3-200A

Geometry
Rectangular
Tip Radius (nm)
Nom: 10
Max: 15
Frequency (KHz)
Nom: 320
Min: 230
Max: 410
Length (µm)
Nom: 125
Min: 140
Max: 110
Spring Const (N/m)
Nom: 42
Min: 20
Max: 80
Width (µm)
Nom: 40
Min: 30
Max: 50
Price: $1,050.00 (USD)
Sold in packs of 5
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Questions? Free, Online Consulting
Overview

Bruker's Focused Ion Beam (FIB) line of probes are the industry standard silicon probe for deep trench measurement!

All FIB probes are based upon a ~320kHz, 40N/m cantilever for use in standard tapping mode on any AFM.

 

The FIB3D2-100A has an aspect ratio of 20:1, a 100nm wide spike at 2um from the tip apex. The spike is tilt compensated to 3 degrees. Aluminum reflective coating.


Tip Specification
High aspect ratio probe based upon Bruker technology and made from our TESP. Aspect ratio of 15:1 at 3um from tip apex.
Tip Height (h): 10 - 15 µm
Front Angle (FA): 1.2 ± 0.5º
Back Angle (BA): 1.2 ± 0.5º
Side Angle (SA): 1.2 ± 0.5º
Cantilever Specification
Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 4µm
Cantilever Thickness (RNG): 3.25 - 4.75µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 45 ± 5nm of Al
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