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FIB3D2-100A

FIB3D2-100A
Geometry
Rectangular
Tip Radius (nm)
Nom: 10
Max: 15
Frequency (KHz)
Nom: 320
Min: 230
Max: 410
Length (µm)
Nom: 125
Min: 140
Max: 110
Spring Const (N/m)
Nom: 42
Min: 20
Max: 80
Width (µm)
Nom: 40
Min: 30
Max: 50
Price: $1,100.00 (USD)
Sold in packs of 5
+
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Questions? Free, Online Consulting
Overview
The FIB3D2-100A has a 100nm wide spike at 2 um from the spike apex.  The spike is tilt-compensated by 3 degrees and the cantilever has Aluminum reflex coating.

Focused Ion Beam (FIB) probes consist of an integrated single crystal TESP silicon cantilever and tip that have been machined (or shaped) to obtain the desired high aspect ratio.  They have near vertical sidewalls and aspect ratios of more than 10:1.  Common applications include semiconductor devices, 3-D micro-optics, and development of precision metrology methods.  FIB tips are designed only for TappingMode and for profiling narrow gaps.  FIB tips should not be used in contact mode. 


Tip Specification
Tip Height (h): 10 - 15 µm
Front Angle (FA): 1 ± 0.5º
Back Angle (BA): 1 ± 0.5º
Side Angle (SA): 1 ± 0.5º
Cantilever Specification
Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 4µm
Cantilever Thickness (RNG): 3.25 - 4.75µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 45 ± 5nm of Al
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