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The hardened TappingMode etched silicon probes consist of the same silicon probes used for most TappingMode applications, Model TESP.  However, the tip side of the cantilever is hardened with a diamond-like carbon coating for extended tip life.  These probes are designed for greater durability when scanning materials which tend to rapidly degrade the end of the tip, such as silicon nitride, polysilicon, or titanuim nitride.