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SCANASYST-AIR-HPI

Frequency

Nom: 55 KHz

Spring Const.

Nom: 0.25N/m

Geometry

Special

Tip Radius

2(nm)

Material

Silicon Nitride

Coating

B: Reflective Al

Frequency

Nom: 75 KHz

Spring Const.

Nom: 2.8N/m

Geometry

Rectangular

Tip Radius

15(nm)

Material

0.01 - 0.025 Ocm Antimony (n) doped Si

Coating

F: Conductive PtSi

B: Reflective Al

Frequency

Nom: 320 KHz

Spring Const.

Nom: 37N/m

Geometry

Rectangular

Tip Radius

2(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

B: Reflective Aluminum

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