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Calibration References

APCS-0001
Platinum-coated calibration grating for AFMs: 100nm Depth, 1µm Pitch, on 18mm Puck. 18mm puck mount...
APCS-0099
Multi-area Calibration artifact, pitch size is selectable from 2µm to 15µm. Mounted on an 18mm disc...
PG
Calibration Artifact: 100nm Depth (+/- 10%), 1µm Pitch, Pt Coated, on 15mm Puck.
PG-STM
Calibration Artifact: 100nm Depth, 1µm Pitch, Pt Coated. This sample is identical to sample PG but ...
SSRM-SMPL-N
n-type staircase SSRM sample. IMEC Calibration Structure - CS01 - SiAs Silicon n-type calibrat...
SSRM-SMPL-OX
Oxide sample Resolution Qualification Structure – RQ04 The imec CAMS resolution qualification s...
SSRM-SMPL-P
p-type staircase SSRM sample. IMEC Calibration Structure - CS04 - SiB Silicon p-type calibrati...
STR10-1800P
Calibration artifact: 180nm step height, 10µm pitch. This VLSI Surface Topography Reference Dies ha...
STR10-180P
Calibration artifact: 18nm step height, 10µm pitch. This VLSI Surface Topography Reference Dies hav...
STR10-440P
Calibration artifact: 44nm step height, 10µm pitch. This VLSI Surface Topography Reference Dies hav...
STR3-1000P
Calibration artifact: 100nm step height, 3µm pitch. This VLSI Surface Topography Reference Dies hav...
STR3-1800P
Calibration artifact: 180nm step height, 3µm pitch. This VLSI Surface Topography Reference Dies hav...
STR3-180P
Calibration artifact: 18nm step height, 3µm pitch. This VLSI Surface Topography Reference Dies have...
STR3-440P
Calibration artifact: 44nm step height, 3µm pitch. This VLSI Surface Topography Reference Dies have...
VGRP-15M
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt Coated, mounted on 15mm disc. These Calibration G...
VGRP-GS
Calibration Artifact: 180nm Depth, 10μm Pitch, Pt-coated, mounted on a glass slide. These SPM Calib...