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Calibration Standards

STS3-1000P
Calibration artifact: 100nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogr...
STS3-1800P
Calibration artifact: 180nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogr...
STS3-180P
Calibration artifact: 18nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogra...
STS3-440P
Calibration artifact: 44nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogra...