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Calibration Standards

AFM scanners should be caibrated periodically to ensure the precision and accuracy of their measurements.  Standards are certified samples of known NIST or PTB traceable feature sizes used to calibrate a scanner within a tight tolerance. Calibration standards are different from calibration references, as references are not certified against a  traceable sample.
STS3-1000P
Calibration artifact: 100nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogr...
STS3-1800P
Calibration artifact: 180nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogr...
STS3-180P
Calibration artifact: 18nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogra...
STS3-440P
Calibration artifact: 44nm step height, 3/10/20µm pitch, NIST traceable. These VLSI surface topogra...