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Application → Holes/ Trenches

Holes/ Trenches

SAA-HPI-SS
Frequency
Nom: 55KHz
Spring Const.
Nom: 0.25N/m
Geometry
Special
Tip Radius
1nm
Material
Silicon Nitride
Coating
B: Reflective Al
TESPA-HAR
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
TESP-HAR
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
SCANASYST-AIR-HPI
Frequency
Nom: 55KHz
Spring Const.
Nom: 0.25N/m
Geometry
Special
Tip Radius
2nm
Material
Silicon Nitride
Coating
B: Reflective Al
HAR1-200-10
Frequency
Nom: 320KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
FIB4-200A
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
CDR300
Frequency
Nom: 292KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Material
0.010 - 0.025 Ωcm Silicon
Coating
B: Reflective Aluminum
FIB2-100S
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
FIB4-200
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
CDR32C
Frequency
Nom: 292KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Material
0.010 - 0.025 Ωcm Silicon
Coating
Amorphous Carbon
B: Reflective Aluminum
CDR50S
Frequency
Nom: 292KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Material
0.010 - 0.025 Ωcm Silicon
Coating
B: Reflective Aluminum
FIB1-100
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
FIB2-100A
Frequency
Nom: 320KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
10nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
EBD-CDR50
Frequency
Nom: 300KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Material
0.01 - 0.025Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
CDR120C
Frequency
Nom: 292KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Material
0.010 - 0.025 Ωcm Silicon
Coating
Carbon
B: Reflective Aluminum
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