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Deep Trench (DT)

Deep Trench (DT) Mode is a proprietary AFM mode developed by Bruker especially for the repeatable measurement of deep semiconductor trench structures < 90 nm. This adaptive scan method, which only collects data when specific system state conditions are met, provides inline metrology capability for semiconductor fabrication. DT Mode only collects data points when “good” scan criteria are met, resulting in improved measurement precision.

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Cantilever Specification

Tip Specification

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Generic Specification

Name
Instrument
Mount
Pack Size
Shape
Base Price
Res. Freq. Nom
Res. Freq. Min
Res. Freq. Max
Spring. Const. Nom
Spring. Const. Min
Spring. Const. Max
Length Nom
Length Min
Length Max
Width Nom
Width Min
Width Max

Tip Specification

Tip Geometry
Tip Front Angle
Tip Back Angle
Tip Side Angle
Tip Radius Nom
Tip Radius Max
Tip SetBack Nom
Tip SetBack RNG

Cantilever Specification

Cantilever Geometry
Number of Cantilevers
Cantilever Thickness Nom
Cantilever Thickness RNG
Front Side Coating
Back Side Coating
Bottom Layer Front
Bottom Layer Back
Top Layer Front
Top Layer Back
DisplayOrderNameInstrumentMountPack SizeShapeRes. Freq. NomRes. Freq. MinRes. Freq. MaxSpring. Const. NomSpring. Const. MinSpring. Const. MaxLength NomLength MinLength MaxWidth NomWidth MinWidth MaxTip GeometryTip Front AngleTip Back AngleTip Side AngleTip Radius NomTip Radius MaxTip Set Back NomTip Set Back RNGCantilever Geom.Num. of CantileversCantilever Thinck. Nom.Cantilever Thinck. RNGFront Side CoatingBack Side CoatingBottom Layer FrontBottom Layer BackTop Layer FrontTop Layer BackBase Price
0000000001 DCS-40 N/A Unmounted 2 Rectangular 320kHz 230kHz 410kHz 42N/m 20N/m 80N/m 125µm 140µm 110µm 30µm 25µm 35µm High Aspect Ratio N/A N/A N/A N/A N/A N/A N/A Rectangular N/A 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000001000.0$1,000.00 (USD)
0000000080 FIB3D2-100A Automated AFM Unmounted 5 Rectangular 320kHz 230kHz 410kHz 42N/m 20N/m 80N/m 125µm 140µm 110µm 40µm 30µm 50µm High Aspect Ratio 1 ± 0.5º 1 ± 0.5º 1 ± 0.5º 10nm 15nm 15µm 5 - 25µm Rectangular 1 4µm 3.25 - 4.75µm N/A Reflective Aluminum N/A N/A N/A 45 ± 5nm of Al 000001000.0$1,000.00 (USD)
0000000320 FIB3D2-100 Vx & UVx - Automated AFM Unmounted 5 Rectangular 320kHz 230kHz 410kHz 42N/m 20N/m 80N/m 125µm 140µm 110µm 40µm 30µm 50µm High Aspect Ratio 1 ± 0.5º 1 ± 0.5º 1 ± 0.5º 10nm 15nm 15µm 5 - 25µm Rectangular 1 4µm 3.25 - 4.75µm N/A N/A N/A N/A N/A N/A 000001000.0$1,000.00 (USD)
0000099999 CDP200A X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Conical N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000003645.0$3,645.00 (USD)
0000099999 CDP55A X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Conical N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001620.0$1,620.00 (USD)
0000099999 CDP55L X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Conical N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001620.0$1,620.00 (USD)
0000099999 EBD-CDR25 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR50 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003000.0$3,000.00 (USD)