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FASTSCAN-B
FastScan-B probes are designed specifically for imaging in fluid on the Dimension FastScan AFM.&nbs
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Critical Dimension (CD) AFM

Critical Dimension Atomic Force Microscopy (CDAFM) is a proprietary afm mode from Bruker. This nondestructive, high-resolution technique enables accurate measurement of three-dimensional (3D) features by using boot-shaped CD afm probes. CD-AFM accurately provides highly linear measurements over a range of line-widths and is unaffected by feature type, density or material type. The technique is able to measure undercut features and can be calibrated using NIST traceable standards to ensure measurement accuracy.

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Generic Specification

Name
Instrument
Mount
Pack Size
Shape
Base Price
Res. Freq. Nom
Res. Freq. Min
Res. Freq. Max
Spring. Const. Nom
Spring. Const. Min
Spring. Const. Max
Length Nom
Length Min
Length Max
Width Nom
Width Min
Width Max

Tip Specification

Tip Geometry
Tip Front Angle
Tip Back Angle
Tip Side Angle
Tip Radius Nom
Tip Radius Max
Tip SetBack Nom
Tip SetBack RNG

Cantilever Specification

Cantilever Geometry
Number of Cantilevers
Cantilever Thickness Nom
Cantilever Thickness RNG
Front Side Coating
Back Side Coating
Bottom Layer Front
Bottom Layer Back
Top Layer Front
Top Layer Back
DisplayOrderNameInstrumentMountPack SizeShapeRes. Freq. NomRes. Freq. MinRes. Freq. MaxSpring. Const. NomSpring. Const. MinSpring. Const. MaxLength NomLength MinLength MaxWidth NomWidth MinWidth MaxTip GeometryTip Front AngleTip Back AngleTip Side AngleTip Radius NomTip Radius MaxTip Set Back NomTip Set Back RNGCantilever Geom.Num. of CantileversCantilever Thinck. Nom.Cantilever Thinck. RNGFront Side CoatingBack Side CoatingBottom Layer FrontBottom Layer BackTop Layer FrontTop Layer BackBase Price
0000000001 CD75 N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000005000.0$5,000.00 (USD)
0000000003 CD100 N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000000640 CDR-50S X3D & InSight - Automated AFM Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 15µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 00000750.00$750.00 (USD)
0000000680 CDR-300 X3D & InSight - Automated AFM Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 15µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 00000750.00$750.00 (USD)
0000000810 CDR-70S X3D & InSight - Automated AFM Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 15µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 00000750.00$750.00 (USD)
0000001070 CDR120 N/A Unmounted 5 Rectangular 300kHz 130kHz 440kHz 40N/m 4N/m 100N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A 10µm 5 - 15µm Rectangular 1 4µm 2.0 - 5.0µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000001000.0$1,000.00 (USD)
0000001290 CDR850 X3D & InSight - Automated AFM Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 15 ± 5 º 15 ± 5 º 15 ± 5 º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004860.0$4,860.00 (USD)
0000001900 CDP55L N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Post) 0 ± 0.2º 0 ± 0.2º 0 ± 0.2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000001200.0$1,200.00 (USD)
0000002190 CDP200A N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Post) 0 ± 0.2º 0 ± 0.2º 0 ± 0.2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003645.0$3,645.00 (USD)
0000002310 CDP55A N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Post) 0 ± 0.2º 0 ± 0.2º 0 ± 0.2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000001620.0$1,620.00 (USD)
0000002410 CDF100 N/A Unmounted 5 Rectangualr 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003000.0$3,000.00 (USD)
0000003450 CD130 N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003000.0$3,000.00 (USD)
0000003470 CDF100C N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm Carbon Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004455.0$4,455.00 (USD)
0000099999 CDR32 N/A Unmounted 5 Rectangular 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 130µm 120µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A N/A 5 - 15µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000001620.0$1,620.00 (USD)
0000099999 EBD-CDR15 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR20 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR25 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR30 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR50 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003000.0$3,000.00 (USD)