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Critical Dimension (CD) AFM

Critical Dimension Atomic Force Microscopy (CDAFM) is a proprietary afm mode from Bruker. This nondestructive, high-resolution technique enables accurate measurement of three-dimensional (3D) features by using boot-shaped CD afm probes. CD-AFM accurately provides highly linear measurements over a range of line-widths and is unaffected by feature type, density or material type. The technique is able to measure undercut features and can be calibrated using NIST traceable standards to ensure measurement accuracy.

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Tip Specification

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Generic Specification

Name
Instrument
Mount
Pack Size
Shape
Base Price
Res. Freq. Nom
Res. Freq. Min
Res. Freq. Max
Spring. Const. Nom
Spring. Const. Min
Spring. Const. Max
Length Nom
Length Min
Length Max
Width Nom
Width Min
Width Max

Tip Specification

Tip Geometry
Tip Front Angle
Tip Back Angle
Tip Side Angle
Tip Radius Nom
Tip Radius Max
Tip SetBack Nom
Tip SetBack RNG

Cantilever Specification

Cantilever Geometry
Number of Cantilevers
Cantilever Thickness Nom
Cantilever Thickness RNG
Front Side Coating
Back Side Coating
Bottom Layer Front
Bottom Layer Back
Top Layer Front
Top Layer Back
DisplayOrderNameInstrumentMountPack SizeShapeRes. Freq. NomRes. Freq. MinRes. Freq. MaxSpring. Const. NomSpring. Const. MinSpring. Const. MaxLength NomLength MinLength MaxWidth NomWidth MinWidth MaxTip GeometryTip Front AngleTip Back AngleTip Side AngleTip Radius NomTip Radius MaxTip Set Back NomTip Set Back RNGCantilever Geom.Num. of CantileversCantilever Thinck. Nom.Cantilever Thinck. RNGFront Side CoatingBack Side CoatingBottom Layer FrontBottom Layer BackTop Layer FrontTop Layer BackBase Price
0000002410 CDF100 N/A Unmounted 5 Rectangualr 350kHz 300kHz 400kHz 35N/m 30N/m 40N/m 125µm 120µm 130µm 35µm 30µm 40µm Critical Dimension (Overhang) 10 ± 2º 10 ± 2º 10 ± 2º N/A N/A 10µm 5 - 25µm Rectangular 1 4µm 3.5 - 4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004185.0$4,185.00 (USD)
0000099999 CDR120 X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001000.0$1,000.00 (USD)
0000099999 CDR120C X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001100.0$1,100.00 (USD)
0000099999 CDR140 X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001250.0$1,250.00 (USD)
0000099999 CDR300 X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000002150.0$2,150.00 (USD)
0000099999 CDR32 X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001620.0$1,620.00 (USD)
0000099999 CDR32C X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001458.0$1,458.00 (USD)
0000099999 CDR50C X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001458.0$1,458.00 (USD)
0000099999 CDR50S X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 00000750.00$750.00 (USD)
0000099999 CDR50SC X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000001458.0$1,458.00 (USD)
0000099999 CDR850 X3D & InSight - Automated AFM Unmounted 5 Rectangular 292kHz 212kHz 397kHz 35N/m 13N/m 93N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A N/A N/A 5 - 15µm Rectangular 1 3.3µm 2.8 - 3.8µm N/A Reflective Aluminum N/A N/A N/A N/A 000004860.0$4,860.00 (USD)
0000099999 EBD-CDR25 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000004000.0$4,000.00 (USD)
0000099999 EBD-CDR50 Insight Unmounted 5 Rectangular 300kHz 200kHz 400kHz 40N/m 20N/m 80N/m 125µm 115µm 135µm 35µm 30µm 40µm Critical Dimension (Overhang) N/A N/A N/A N/A <10nm 15µm 5 - 25µm Rectangular N/A 3.75µm 3.0-4.5µm N/A Reflective Aluminum N/A N/A N/A 40 ± 10 nm of Al 000003000.0$3,000.00 (USD)