To correspond with the recent announcement of Bruker's SSRM-HR module for the Dimension Icon platform, Bruker is excited to offer the new SSRM-DIA high-resolution SSRM probes and associated SSRM reference samples from IMEC.  

The SSRM-DIA probes are made from solid Boron-doped polycrystaline diamond in a pyramid shape.  These extremely hard tips enable high-resolution electrical AFM measurements requiring high forces, such as SSRM and other electrical and mechanical characterization methods.  The measured resistance of the diamond tips on a Platinum surface is between 10 and 1000 kOhm, depending on the tip radius.  The electrical resolution can be below 1 nm, as measured on a dedicated buried oxide sample in an optimized environment.

There are three different types of SSRM reference samples now available:
- SSRM-SMPL-P: A Silicon p-type <100> calibration structure, B-doped on a p-type substrate
- SSRM-SMPL-N: A Silicon n-type <100> calibration structure, As doped
- SSRM-SMPL-OX: A 0.5 nm Oxide resolution qualification structure