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STR3-180P

Price: $1,870.00 (USD)
Questions? Free, Online Consulting
Overview
Calibration artifact: 18nm step height, 3µm pitch. This VLSI Surface Topography Reference Dies have a variety of Step heights and Pitchs for daily monitoring of SPM performance. The silicon die with patterned layer of SiO2 is coated with Pt. All die are 8mm x 8mm and unmounted. They are not certified or traceable to NIST.