VITA nTA Calibration Sample Set
Calibration artifact: 18nm step height, 3/10/20µm pitch, NIST traceable
Calibration artifact: 18nm step height, 3µm pitch
Calibration artifact: 44nm step height, 3/10/20µm pitch, NIST traceable
Calibration artifact: 44nm step height, 3µm pitch
Calibration artifact: 180nm step height, 3/10/20µm pitch, NIST traceable
Calibration artifact: 180nm step height, 3µm pitch
Calibration artifact: 18nm step height, 10µm pitch
VITA Scanning Thermal Microscopy, SThM, test sample