Caliber™

Calibration artifact: 100nm step height, 3µm pitch

Calibration artifact: 100nm step height, 3/10/20µm pitch, NIST traceable

Calibration artifact: 44nm step height, 10µm pitch

Calibration artifact: 44nm step height, 3µm pitch

Calibration artifact: 180nm step height, 3µm pitch

Calibration artifact: 180nm step height, 3/10/20µm pitch, NIST traceable

Calibration artifact: 18nm step height, 10µm pitch

Calibration artifact: 18nm step height, 3µm pitch

Calibration artifact: 18nm step height, 3/10/20µm pitch, NIST traceable

Calibration artifact: 44nm step height, 3/10/20µm pitch, NIST traceable