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Product Description:

The EBD-CDR probes for 3D reference and hybrid metrology: witha full range of EBD-CDR probes from 130 nm down to 15 nm, this ispushing the limits of 3D-AFM technology for measuring tight dimensionsand extending its capability for future nodes. It brings EBD´skey strength: precise tip orientation, precise control in tip dimensions(length, total diameter, vertical edge height, overhang) and largevolumeproduction to undercut applications. These tips do not have a wearresistance coating - butmade from bulk wear resistance diamond like carbon.

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Model Instrument Mount Pack Size Price Pack Quantity
EBD-CDR50 Insight Unmounted 5 $3,000.00 (USD)

Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm
Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max.
Rectangular 300 200 400 40 20 80 125 115 135 35 30 40

Tip Specification

50 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life.
Geometry: Critical Dimension (Overhang)
Tip Height (h): 10 - 15µm
Tip Radius (Max): <10 nm
Tip SetBack (TSB)(Nom): 15 µm
Tilt Compensation: 3º
Tip Set Back (TSB)(RNG): 5 - 25 µm
Overhang: 5 - 10 nm
Effective Length: 200 - 250 nm
Tip Dia.(nm): 45 - 55 nm
Vertical Edge Height(nm): <15 nm

Cantilever Specification

Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.
Material: 0.01 - 0.025Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilever Thickness (Nom): 3.75 µm
Cantilever Thickness (RNG): 3.0-4.5 µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 40 ± 10 nm of Al