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Product Description:

A wafer of HarmoniX Probes
"Soft" version for nanoscale material property mapping of softer samples in the 0.5MPa to 1GPa hardness range. HMXS are significantly softer (about 5x) than HMX but with similar bandwidth.  This makes HMXS better for:
+ Adhesion measurements where background noise can dominate.  These probes are about 5x more sensitive (background noise levels of a few hundred pN).
+ High resolution on softer materials where peak forces must be small to control sample deformation
+ Stiffness measurements on softer materials.
HMX probes are better for stiffer samples and sticky samples where the tip can get stuck to the surface.  Unmounted for HamorniX-enabled, NS5-based AFMs.
*Due to the inherent danger of mishandling or contamination during extraction of probes by non-Veeco personnel, we do not guarantee performance of wafers once opened at the consumers site.  Instead, we highly recommend buying in larger quantities of 10-packs to guarantee performance, taking advantage of bulk discount pricing.

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Model Mount Pack Size Price Pack Quantity
HMXS-W Unmounted 375 $7,000.00 (USD)

Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm
Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max.
Rectangular 40 25 55 1 0.3 2 300 290 310 25 20 30

Tip Specification

These probes are the characteristic "off-axis" design specific to the Veeco HarmoniX mode. The torsional/flexural spring constant is 17N/m.
Geometry: Rotated (Symmetric)
Tip Height (h): 4 - 10µm
Front Angle (FA): 25 ± 2.5º
Back Angle (BA): 15 ± 2.5 º
Side Angle (SA): 22.5 ± 2.5 º
Tip Radius (Nom): 10 nm
Tip Radius (Max): 12 nm
Tip SetBack (TSB)(Nom): 10 µm
Tip Set Back (TSB)(RNG): 5 - 15 µm

Cantilever Specification

Aluminum reflective coating on the backside of the cantilever is standard. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications. Frequency Ratio Ft/Fo: 17
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 3 µm
Cantilever Thickness (RNG): 2.0 - 3.5 µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 40 ± 10 nm of Al
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