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Product Description:

A wafer of HarmoniX Probes
For nanoscale material property mapping of standard samples in the 10MPa to 10GPa hardness range. HMX probes are preferred over HMXS version probes for stiffer and sticky samples where the tip can get more easily stuck to the surface.  Unmounted for HamorniX-enabled, NS5-based AFMs.
*Due to the inherent danger of mishandling or contamination during extraction of probes by non-Veeco personnel, we do not guarantee performance of wafers once opened at the consumers site.  Instead, we highly recommend buying in larger quantities of 10-packs to guarantee performance, taking advantage of bulk discount pricing.

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Model Mount Pack Size Price Pack Quantity
HMX-W Unmounted 375 $7,000.00 (USD)

Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm
Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max.
Rectangular 60 45 75 4 1 6 300 290 310 25 20 30

Tip Specification

These probes are the characteristic "off-axis" design specific to the Veeco HarmoniX mode. The torsional/flexural spring constant is 17N/m.
Geometry: Rotated (Symmetric)
Tip Height (h): 4 - 10µm
Front Angle (FA): 25 ± 2.5º
Back Angle (BA): 15 ± 2.5 º
Side Angle (SA): 22.5 ± 2.5 º
Tip Radius (Nom): 10 nm
Tip Radius (Max): 12 nm
Tip SetBack (TSB)(Nom): 10 µm
Tip Set Back (TSB)(RNG): 5 - 15 µm

Cantilever Specification

Aluminum reflective coating on the backside of the cantilever is standard. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications. Frequency Ratio Ft/Fo: 17
Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 4 µm
Cantilever Thickness (RNG): 3.0 - 5.3 µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 40 ± 10 nm of Al
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