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Product Description:

A pack of High Aspect Ratio Probes
High Aspect Ratio "Super Cone" conical probes for TappingMode measurements and small feature metrology.  Unmounted for Vx AFPs, MultiMode, BioScope and Dimension AFMs.

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Model Mount Pack Size Price Pack Quantity
IMPSC-5 Unmounted 5 $1,450.00 (USD)

Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm
Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max.
Rectangular 350 300 400 35 30 40 125 110 140 35 30 40

Tip Specification

Super Cone Tip
Geometry: Conical
Tip Height (h): 7 - 11µm
Front Angle (FA): 10 ± 2º
Back Angle (BA): 10 ± 2 º
Side Angle (SA): 10 ± 2 º
Tip Radius (Nom): 8 nm
Tip Radius (Max): 10 nm
Tip SetBack (TSB)(Nom): 15 µm
Tilt Compensation: 0º
Tip Set Back (TSB)(RNG): 5 - 25 µm

Cantilever Specification

Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 4 µm
Cantilever Thickness (RNG): 3.5 - 4.5 µm
Back Side Coating: Reflective Aluminum
Top Layer Back: 40 ± 10 nm of Al
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