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SSRM-DIA
Geometry
RectangularFrequency (KHz)
Length (µm)
Nom: 225
Min:
Max:
Spring Const (N/m)
Nom: 27
Min: 14
Max: 47
Width (µm)
Nom: 50
Min:
Max:
Geometry
Rectangular
Frequency (KHz)
Length (µm)
Nom: 305
Min:
Max:
Spring Const (N/m)
Nom: 11
Min: 5
Max: 19
Width (µm)
Nom: 50
Min:
Max:
Geometry
Rectangular
Frequency (KHz)
Length (µm)
Nom: 465
Min:
Max:
Spring Const (N/m)
Nom: 3
Min: 1
Max: 6
Width (µm)
Nom: 50
Min:
Max:
2 Total Related Products
Unmounted p-type staircase SSRM sample.
PLEASE NOTE: Sample cross-sectioning by cleaving or polishing is required.
IMEC Calibration Structure - CS04 - SiB
Silicon p-type <100> calibration structure, B-doped on a p-type substrate
Total thickness: ±6 um
Works best with SSRM-DIA probes. n-type staircase (SSRM-SMPL-N) and Oxide sample (SSRM-SMPL-OX) also available separately.
View...
PLEASE NOTE: Sample cross-sectioning by cleaving or polishing is required.
IMEC Calibration Structure - CS04 - SiB
Silicon p-type <100> calibration structure, B-doped on a p-type substrate
Total thickness: ±6 um
Works best with SSRM-DIA probes. n-type staircase (SSRM-SMPL-N) and Oxide sample (SSRM-SMPL-OX) also available separately.
View...Unmounted Oxide sample.
PLEASE NOTE: Sample cross-sectioning by cleaving or polishing is required.
Resolution Qualification Structure – RQ04
The imec CAMS resolution qualification structures consist of a thin uniform layer of SiO2 confined between highly-doped grown poly-Si and implanted Si. The RQ04 standard has an average thickness of 0.4±0.1nm and is ideally suited to determine the resolution of electrical probes or for imaging techniques such as Scanning Electron Microscopy.
Works best with SSRM-DIA probes. n-type staircase (SSRM-SMPL-N) and p-type staircase (SSRM-SMPL-P) also available separately.
View...
PLEASE NOTE: Sample cross-sectioning by cleaving or polishing is required.
Resolution Qualification Structure – RQ04
The imec CAMS resolution qualification structures consist of a thin uniform layer of SiO2 confined between highly-doped grown poly-Si and implanted Si. The RQ04 standard has an average thickness of 0.4±0.1nm and is ideally suited to determine the resolution of electrical probes or for imaging techniques such as Scanning Electron Microscopy.
Works best with SSRM-DIA probes. n-type staircase (SSRM-SMPL-N) and p-type staircase (SSRM-SMPL-P) also available separately.
View...Questions? Free, Online Consulting
Overview
Pyramidal Solid Diamond Probes
**This probe has been discontinued. Please look into our other similar probes from Adama such as the AD-2.8-AS, AD-2.8-SS, AD-40-SS, and the AD-40-AS.*
The IMEC diamond AFM tips are made from solid boron-doped polycrystalline diamond. These extremely hard tips enable high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM) and other electrical and mechanical characterization methods. Each probe has three different cantilevers with distinct spring constants for ultimate versatility.
The tips are made of B-doped polycrystalline diamond in a pyramidal shape. The measured resistance of the diamond tips on a Platinum surface is between 10 and 1000 kOhm, depending on the tip radius. The electrical resolution can be below 1nm, as measured on a dedicated buried oxide sample in an optimized environment.
Each probe has three cantilevers with different spring constants covering a wide range of force constants, from 3 to 27 N/m. The Ni cantilevers are mounted on a metallized Si chip (3.4 x 1.6 x 0.4 mm).
Tip Specification
Boron-doped polycrystalline diamond in a pyramidal shape.
Cantilever Specification
Material: Nickel
Geometry: Rectangular
Cantilevers Number: 3
Cantilever Thickness (Nom): 5µm