Sample

Application

Mode

AFM

Resonant Frequency:

kHz

Spring Constant:

N/m

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SSRM-DIA

Pyramidal Solid Diamond Probes The IMEC diamond AFM tips are made from solid boron-doped polycrys

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EBD-CDR50

Product Description:

The EBD-CDR probes for 3D reference and hybrid metrology: with a full range of EBD-CDR probes from 130 nm down to 15 nm, this is pushing the limits of 3D-AFM technology for measuring tight dimensions and extending its capability for future nodes. It brings EBD´s key strength: precise tip orientation, precise control in tip dimensions (length, total diameter, vertical edge height, overhang) and large volume production to undercut applications. These tips do not have a wear resistance coating - but made from bulk wear resistance diamond like carbon.

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Model	Instrument	Mount	Pack Size	Price	Pack Quantity
EBD-CDR50	Insight	Unmounted	5	$3,000.00 (USD)

Shape	Resonant Freq. kHz			Spring Const. N/m			Length µm			Width µm
Shape	Nom.	Min.	Max.	Nom.	Min.	Max.	Nom.	Min.	Max.	Nom.	Min.	Max.
Rectangular	300	200	400	40	20	80	125	115	135	35	30	40

Tip Specification

50 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life.

Tip Schematic

Geometry:	Critical Dimension (Overhang)
Tip Height (h):	10 - 15µm
Tip Radius (Max):	<10nm
Tip SetBack (TSB)(Nom):	15µm
Tilt Compensation:	3º
Tip Set Back (TSB)(RNG):	5 - 25µm
Overhang:	5 - 10nm
Effective Length:	200 - 250nm
Tip Dia.(nm):	45 - 55nm
Vertical Edge Height(nm):	<15nm

Cantilever Specification

Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.

Cantilever schematic

Material:	0.01 - 0.025Ωcm Antimony (n) doped Si
Geometry:	Rectangular
Cantilever Thickness (Nom):	3.75µm
Cantilever Thickness (RNG):	3.0-4.5µm
Back Side Coating:	Reflective Aluminum
Top Layer Back:	40 ± 10 nm of Al