Bruker AFM Probes - FIB3D2-100

Geometry

Rectangular

Tip Radius (nm)

Nom: 10

Max: 15

Frequency (KHz)

Nom: 320

Min: 230

Max: 410

Length (µm)

Nom: 125

Min: 140

Max: 110

Spring Const (N/m)

Nom: 42

Min: 20

Max: 80

Width (µm)

Nom: 40

Min: 30

Max: 50

Price: $1,100.00 (USD)

Sold in packs of 5

Questions? Free, Online Consulting

Overview

Bruker's Focused Ion Beam (FIB) line of probes are the industry standard silicon probe for deep trench measurement!

All FIB probes are based upon a ~320kHz, 40N/m cantilever for use in standard tapping mode on any AFM.

The FIB3D2-100 has an aspect ratio of 20:1, a 100nm wide spike at 2um from the tip apex. The spike is tilt compensated to 3 degrees.

Tip Specification

Tip Height (h): 10 - 15 µm

Front Angle (FA): 1 ± 0.5º

Back Angle (BA): 1 ± 0.5º

Side Angle (SA): 1 ± 0.5º

Cantilever Specification

Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si

Geometry: Rectangular

Cantilevers Number: 1

Cantilever Thickness (Nom): 4µm

Cantilever Thickness (RNG): 3.25 - 4.75µm

FIB3D2-100